Physical vacuum deposition system PVD 75 (Kurt J. Lesker, USA)

Physical vacuum deposition system PVD 75 (Kurt J. Lesker, USA) for development of the surface nanostructures.

Features:

  • Volume of the stainless steel chamber is 75 liters,
  • Base pressure criogenic pump is 5x10-7 Torr
  • Electron beam evaporation
  • Thermal evaporation (5 kW)
  • System Control is PC-Based HMI, with recipe control and datalogging
  • Two quartz windows for optical measurement and control of deposition processes